| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To reduce power consumption, volume, weight and noise of an ICP analyzer (inductively coupled plasma spectrometer). <P>SOLUTION: An exhaust gas cooling apparatus is provided with a spare cooling pipe 21 between an ICP generation part 1 and a gas cooler 6N, and cools with water a face of the spare cooling pipe 21 coming in contact with mixed carrier gases G. Thus, the load of the gas cooler 6N is reduced, and the cooling capacity of the exhaust gas cooling apparatus is reduced to miniaturize the the cooling apparatus. Also, by eliminating atmospheric mixing at a former stage of the gas cooler 6N necessary in the prior art, the discharge air volume of an exhaust fan 10N is reduced to miniaturize the fan. Thus, the power consumption, volume, weight and noise of an ICP analyzer can be reduced. <P>COPYRIGHT: (C)2005,JPO&NCIPI</p> |
