| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a field emission type electron source with large area, capable of stably emitting electron with high efficiency at low cost. <P>SOLUTION: The field emission type electron source comprises a lower electrode, a multiple tunnel conductive layer including conductive fine particles and inter-particle insulation bodies intercalated between the conductive fine particles, and a surface electrode formed on the multiple tunnel conductive layer, and emits electron by the voltage impressed between the surface electrode as a positive electrode and the lower electrode. The inter-particle insulation body contains a cross-linked polymer having borazine skeleton bonded with the conductive fine particle. <P>COPYRIGHT: (C)2005,JPO&NCIPI</p> |
