发明名称 |
Laser wavelength control unit with piezoelectric driver |
摘要 |
An electric discharge laser with fast wavelength correction. Fast wavelength correction equipment includes at least one piezoelectric drive and a fast wavelength measurement system and fast feedback response times. In a preferred embodiment, equipment is provided to control wavelength on a slow time frame of several milliseconds, on a intermediate time from of about one to three millisecond and on a very fast time frame of a few microseconds. Techniques include a combination of a relatively slow stepper motor and a very fast piezoelectric driver for tuning the laser wavelength using a tuning mirror. A preferred control technique is described (utilizing a very fast wavelength monitor) to provide the slow and intermediate wavelength control and a piezoelectric load cell in combination with the piezoelectric driver to provide the very fast (few microseconds) wavelength control. |
申请公布号 |
AU7682101(A) |
申请公布日期 |
2002.01.02 |
申请号 |
AU20010076821 |
申请日期 |
2001.04.30 |
申请人 |
CYMER, INC. |
发明人 |
RONALD L. SPANGLER;ROBERT N. JACQUES;GEORGE J. EVERAGE;STUART L. ANDERSON;FREDERICK A. PALENSCHAT;IGOR V FOMENKOV;RICHARD L SANDSTROM;WILLIAM N PARTLO;JOHN M. ALGOTS;DANIEL J. W. BROWN |
分类号 |
H01S3/137;G03F7/20;H01S3/036;H01S3/038;H01S3/04;H01S3/041;H01S3/097;H01S3/0971;H01S3/0975;H01S3/104;H01S3/105;H01S3/1055;H01S3/11;H01S3/13;H01S3/131;H01S3/134;H01S3/22;H01S3/225 |
主分类号 |
H01S3/137 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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