摘要 |
PROBLEM TO BE SOLVED: To provide a door for a sealable enclosure for wafers, the door allowing a panel to be fixed to a sidewall without using a metal fastener. SOLUTION: The sealable enclosure 56 for wafers has a door 36 having a latching mechanism 60, and the door 36 includes an enclosure with a cammed member 80, which is rotatable on a post 110 and engages with a pair of latching arms 82. The movement of latching arms 82 is carried out by a cammed portion of the cammed member, configured so as to make the cam follower portions of the latching arms move in the axial direction, with respect to the cammed member and in the radial direction. The latching arm 82 pivots on a fulcrum within the enclosure. The latching mechanism is accessible via a panel that is attached by integral detents on the panel 180, which cooperates with recesses 198 on interior edge walls 55 of the door enclosure. COPYRIGHT: (C)2009,JPO&INPIT |