发明名称 WAFER ENCLOSURE WITH DOOR
摘要 PROBLEM TO BE SOLVED: To provide a door for a sealable enclosure for wafers, the door allowing a panel to be fixed to a sidewall without using a metal fastener. SOLUTION: The sealable enclosure 56 for wafers has a door 36 having a latching mechanism 60, and the door 36 includes an enclosure with a cammed member 80, which is rotatable on a post 110 and engages with a pair of latching arms 82. The movement of latching arms 82 is carried out by a cammed portion of the cammed member, configured so as to make the cam follower portions of the latching arms move in the axial direction, with respect to the cammed member and in the radial direction. The latching arm 82 pivots on a fulcrum within the enclosure. The latching mechanism is accessible via a panel that is attached by integral detents on the panel 180, which cooperates with recesses 198 on interior edge walls 55 of the door enclosure. COPYRIGHT: (C)2009,JPO&INPIT
申请公布号 JP2009060118(A) 申请公布日期 2009.03.19
申请号 JP20080256281 申请日期 2008.10.01
申请人 ENTEGRIS INC 发明人 MIKKELSEN KIRK J;ADAMS MICHAEL S;BORES GREG;WISEMAN BRIAN S
分类号 B65D85/86;H01L21/673 主分类号 B65D85/86
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