Liquid ejection head and manufacturing method of liquid ejection head

摘要

A liquid ejection head with high environmental reliability which suppresses a crack of a Si substrate and peeling-off of an ejection port forming member by relaxing a residual stress in a printing element substrate and a manufacturing method of a liquid ejection head are provided. For that purpose, after the printing element substrate is bonded and fixed to a support member, the support member is screwed and fixed through an elastic member.

主权项

1. A liquid ejection head, comprising:
a printing element substrate including an ejection port ejecting a liquid; a plate-shaped first support member formed of a resin, configured to support the printing element substrate and including a supply port for supplying the liquid to the printing element substrate; a second support member configured to support the first support member and formed with a channel for supplying the liquid to the first support member; and a first screw and a second screw for joining the first support member and the second support member, the first screw being provided at one side of the printing element substrate, and the second screw being provided at the other side of the printing element substrate, wherein the first support member includes a thin portion having a thickness smaller than a thickness of a portion of the first support members where the printing element substrate is disposed, the thin portion being provided between a portion of the first support member where one of the first screw and the second screw is disposed and the portion where the printing element substrate is disposed, and wherein the first support member is deformed so that a portion between the second screw and the first screw becomes convex toward a side at which the printing element substrate is provided.