发明名称 |
HANDLER FOR TESTING SEMICONDUCTOR DEVICES AND METHOD FOR CONTROLLING THE SAME |
摘要 |
A handler for testing semiconductor devices and a method for controlling the same are provided to improve space utility by loading and unloading a semiconductor in a horizontal direction and testing the semiconductor in a vertical direction. A loading unit(30) loads semiconductor devices to be tested on a test tray. A first chamber heats or cools the semiconductor devices of the test tray to a given test temperature. A first rotator(52) rotates the test tray in the first chamber at a right angle. A test unit has a test head(62) which is electrically connected to the semiconductor devices. A second chamber cools or heats the semiconductor devices carried from the test unit. A second rotator(72) rotates the test tray in the second chamber at a right angle. An unloading unit(40) unloads the semiconductor devices from the test tray.
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申请公布号 |
KR20070089118(A) |
申请公布日期 |
2007.08.30 |
申请号 |
KR20070083544 |
申请日期 |
2007.08.20 |
申请人 |
MIRAE CORPORATION |
发明人 |
PARK, YONG GEUN;YUN, DAE GON |
分类号 |
H01L21/66 |
主分类号 |
H01L21/66 |
代理机构 |
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代理人 |
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主权项 |
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