发明名称 HANDLER FOR TESTING SEMICONDUCTOR DEVICES AND METHOD FOR CONTROLLING THE SAME
摘要 A handler for testing semiconductor devices and a method for controlling the same are provided to improve space utility by loading and unloading a semiconductor in a horizontal direction and testing the semiconductor in a vertical direction. A loading unit(30) loads semiconductor devices to be tested on a test tray. A first chamber heats or cools the semiconductor devices of the test tray to a given test temperature. A first rotator(52) rotates the test tray in the first chamber at a right angle. A test unit has a test head(62) which is electrically connected to the semiconductor devices. A second chamber cools or heats the semiconductor devices carried from the test unit. A second rotator(72) rotates the test tray in the second chamber at a right angle. An unloading unit(40) unloads the semiconductor devices from the test tray.
申请公布号 KR20070089118(A) 申请公布日期 2007.08.30
申请号 KR20070083544 申请日期 2007.08.20
申请人 MIRAE CORPORATION 发明人 PARK, YONG GEUN;YUN, DAE GON
分类号 H01L21/66 主分类号 H01L21/66
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