发明名称 繊維含有樹脂基板及び半導体装置の製造方法
摘要 A fiber-containing resin substrate for collectively encapsulating a semiconductor-device-mounting surface of a substrate on which semiconductor devices are mounted or a semiconductor-device-forming surface of a wafer on which a semiconductor device is formed, including a resin-impregnated fibrous base material which is obtained by impregnating a fibrous base material with a thermosetting resin and semi-curing or curing the thermosetting resin and has a linear expansion coefficient (ppm/° C.) in an X-Y direction of less than 3 ppm, and an uncured resin layer formed of an uncured thermosetting resin on one side of the resin-impregnated fibrous base material.
申请公布号 JP5934078(B2) 申请公布日期 2016.06.15
申请号 JP20120252884 申请日期 2012.11.19
申请人 信越化学工業株式会社 发明人 関口 晋;塩原 利夫;秋葉 秀樹;中村 朋陽
分类号 H01L23/29;H01L23/12;H01L23/31 主分类号 H01L23/29
代理机构 代理人
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