LASER BEAM MACHINING DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a laser beam machining device capable of precisely cutting a work without producing a fusing and a cracking out of a predetermined cutting line on the surface of the work.

SOLUTION: The laser beam machining device 100 comprises: a stage 107 adapted for mounting the object 1; a laser source 101 for emitting pulse laser light L; a converging lens 105 for converging the laser light L within the object 1 to form a modified spot at a converging point P thereof by the irradiation of the laser light L of one pulse; and a stage control unit 115 and an overall control unit 127 for forming modified regions by the plurality of modified spots formed along a predetermined cutting line 5 so as to make the distance between the adjoining modified spots almost certain, having a function of making the repeated frequency of the laser light L and the moving velocity of the converging point P almost certain and linearly moving the converging point P along the predetermined cutting line 5.

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