| 摘要 |
An apparatus for transferring a wafer is provided to prohibit the facility from being abruptly stopped and minimize the defective rate of the product by operating one robot arm of two robot arms even if the other robot arm is in the abnormal condition. An apparatus for transferring a wafer comprises plural robot arms(110,120); and an error sensing unit for detecting errors of the robot arms and selectively controlling the operation of the robot arms. The error sensing unit contains a level sensing part(240) sensing level values of the robot arms, a power sensing part(250) sensing the power values provided to the robot arms, and a control part(300) receiving electrical signals from the level sensing part and the power sensing part and stopping the operation of the robot arm if one of the level values is out of the reference level value or one of the power values is out of the reference power value.
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