| 摘要 |
PROBLEM TO BE SOLVED: To provide an optical device in which design flexibility is enhanced, cost is reduced, dimension accuracy is excellent and a wavelength separation is performed accurately for a long time, and to provide a variable wavelength filter module and an optical spectrum analyzer. SOLUTION: A first substrate 2, on which a movable plate 21 furnished with a first light reflection part 25 is movably provided, and a second substrate 3, on which a second light reflection part 34 facing to the first light reflection part 25 is furnished, are bonded via a bonding film 41, wherein the bonding film 41 includes: an Si framework having a random atomic structure including siloxane (Si-O) binding; and a leaving group bound to the Si framework, wherein the bonding film 41 bonds the first substrate 2 and the second substrate 3 by the adhesiveness developed in the region of the surface of the bonding film 41 where a leaving group existing in the vicinity of the surface of the bonding film 41 leaves the Si framework when energy is given to at least part of the bonding film 41. COPYRIGHT: (C)2009,JPO&INPIT
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