| 摘要 |
PROBLEM TO BE SOLVED: To perform polarization processing uniformly on a plurality of electromechanical conversion elements, in the plurality of electromechanical conversion elements provided on an actuator substrate.SOLUTION: There is provided a polarization processing device performing polarization processing on an actuator substrate provided with a plurality of electromechanical conversion elements including a substrate, ground film, lower electrode, electromechanical conversion film, upper electrode, a lower electrode pad electrically connected to the lower electrode, and an upper electrode pad electrically connected to the upper electrode, where one electrode of the lower electrode and the upper electrode is configured to be a common electrode common among the plurality of electromechanical conversion elements, and the other electrode of the lower electrode and the upper electrode is configured to be an individual electrode corresponding to each of the electromechanical conversion elements; the common electrode is electrically connected to an external input pad, and includes stage to hold the actuator substrate and a conductive voltage application jig in contact with the external input pad on the stage.SELECTED DRAWING: Figure 3 |
