| 摘要 |
PROBLEM TO BE SOLVED: To provide a semiconductor device that achieves improvement in reproducibility and positioning accuracy while facilitating probing positioning in the measurement of electric characteristics and allows acquisition of a highly-accurate measurement value with excellent reproducibility, particularly, in the measurement of high-frequency characteristics, and its measurement method. SOLUTION: Signal pads S(a), S(b) are formed on the main face of a TEG 10. Ground pads G1(a), G2(a) are formed on both sides sandwiching the signal pad S(a) therebetween. Ground pads G1(b), G2(b) are formed on both sides sandwiching the signal pad S(b) therebetween. Each scale pattern P1 composed of a plurality of scale lines is provided between respective electrode pads being between the signal pad S(a) and each of the ground pads G1(a), G2(a). Each scale pattern P1 is provided between respective electrode pads being between the signal pad S(b) and each of the ground pads G1(b), G2(b) arranged on both sides of the signal pad S(b). COPYRIGHT: (C)2008,JPO&INPIT
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