发明名称 SEMICONDUCTOR CIRCUIT ARRANGEMENT AND METHOD FOR THE PRODUCTION THEREOF
摘要 The invention relates to a semiconductor circuit arrangement (10) and to a method for the production thereof, in which a protective material region (50) made of poly(para-xylene) is formed for the material separation of a first circuit region (30) and a second circuit region (40).
申请公布号 WO2006021483(A3) 申请公布日期 2006.10.05
申请号 WO2005EP53779 申请日期 2005.08.03
申请人 INFINEON TECHNOLOGIES AG;HALIK, MARCUS;DEHM, CHRISTINE;KLAUK, HAGEN;ZSCHIESCHANG, UTE;SCHMID, GUENTER 发明人 HALIK, MARCUS;DEHM, CHRISTINE;KLAUK, HAGEN;ZSCHIESCHANG, UTE;SCHMID, GUENTER
分类号 H01L51/10;H01L27/28 主分类号 H01L51/10
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