n-TYPE SEMICONDUCTOR CARBON NANOTUBES, PROCESS FOR PRODUCTION THEREOF, AND PROCESS FOR PRODUCTION OF SEMICONDUCTOR DEVICES

摘要

n-Type semiconductor carbon nanotubes are produced by mixing a chemical substance having a functional group such as amino or alkyl with an inert gas and reacting a semiconducting carbon nanotube (1a) with the mixture under irradiation with VUV to bind the functional group (such as amino or alkyl) covalently to the carbon nanotube (1a). The functional groups covalently bound to the semiconducting carbon nanotube (1a) act as electron-donating groups to convert the carbon nanotube (1a) into an n-type semiconductor. According to the invention, stable n-type semiconductor carbon nanotubes (1) are obtained which little change into p-type semiconductors because the electron-donating groups are covalently bound thereto. Further, the n-type semiconductor carbon nanotubes (1) are protected from bundling or contamination because they are produced by a dry process. Thus, homogeneous and highly reliable and stable n-type semiconductor carbon nanotubes (1) can be produced.