| 摘要 |
PROBLEM TO BE SOLVED: To prevent the generation of cracks at the end of an individual liquid chamber in a diaphragm. SOLUTION: When the diaphragm 7 is deformed by a piezoelectric drive unit 6, liquid in the individual liquid chamber 5 formed in a substrate 3 is pressurized and discharged from a discharge opening 2. The deformation amount of the diaphragm 7 is increased at both ends of the individual liquid chambers 5 in the longitudinal direction, and there is a possibility of generating cracks. Therefore, a projecting portion 8 projecting like a step from the diaphragm 7 to the individual chamber 5 is formed to strength the rigidity of the each of both the ends of the diaphragm 7. Even if a thin diaphragm 7 is used corresponding to the individual liquid chamber 5 which is thinned for high precision, a local increase in the deformation amount of the diaphragm 7 that leads to the generation of cracks can be prevented. COPYRIGHT: (C)2007,JPO&INPIT
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