METHOD OF MANUFACTURING SEMICONDUCTOR SUBSTRATE

摘要

PROBLEM TO BE SOLVED: To provide a method of manufacturing a semiconductor substrate capable of reducing the manufacturing costs of the semiconductor substrate. SOLUTION: The manufacturing method of a semiconductor substrate related to a first aspect includes: a preparation process for preparing a base substrate formed of Cr; and a nitriding process for nitriding a (110) plane of the base substrate to form a (111) plane of a chromium nitride layer. COPYRIGHT: (C)2008,JPO&INPIT