EXPOSURE DEVICE AND EXPOSURE METHOD

摘要

An exposure device includes a rotation driving section that rotationally drives an exposure object; a light irradiation section that irradiates an exposure surface of the exposure object with laser light; a slide moving section secured to the rotation driving section or the light irradiation section, and moving the rotation driving section or the light irradiation section along the exposure surface in a direction crossing a direction of rotation of the rotation driving section; a signal generating section that transmits an analog modulating signal to the light irradiation section in accordance with a rotation synchronization signal from the rotation driving section, the analog modulating signal causing an intensity of the laser light to be changed; and a controlling section that controls movements of the rotation driving section, the slide moving section, and the light irradiation section.

主权项

1. A film manufacturing method comprising:
forming a roll die used in roll imprint; and transferring a pattern on the roll die to a film substrate,
wherein the forming the roll die comprises:rotating an exposure object and generating a rotational synchronization signal;causing a laser light to scan along an exposure surface of the rotating exposure object in a direction crossing a direction of rotation of the exposure object, the exposure surface being irradiated with the laser light; andmodulating an intensity of the laser light in accordance with the rotational synchronization signal,
wherein the intensity of the laser light is modulated in accordance with a rotation period of the exposure object,wherein the intensity of the laser light with which the exposure object is irradiated in a same rotation phase of the exposure object is changed with time, andwherein the minimum value of the intensity of the laser light is lower than a threshold value of an amount of the laser light received for causing a reaction that makes the exposure object soluble in a developer; andforming grooves separated from each other on the exposure object.