发明名称 METHOD OF TREATING WORK AND SYSTEM FOR TREATING WORK
摘要 <p>[Problems][Means for Solving Problems] A method in which a work is treated by applying thereto a mixed-phase fluid comprising an inert gas and/or air, water vapor, and droplets, characterized in that the inert gas and/or air is mixed with water vapor to form a gas mixture and then the gas mixture is mixed with a liquid to form the droplets. In the method, properties of the gas mixture can be regulated.</p>
申请公布号 WO2009013797(A1) 申请公布日期 2009.01.29
申请号 WO2007JP64374 申请日期 2007.07.20
申请人 AQUA SCIENCE CORPORATION;KYUSHU UNIVERSITY, NATIONAL UNIVERSITY CORPORATION;MORITA, YOSHIHISA;YAMASE, MASAO;WATANABE, MASAO;SANADA, TOSHIYUKI;SHIROTA, MINORI 发明人 MORITA, YOSHIHISA;YAMASE, MASAO;WATANABE, MASAO;SANADA, TOSHIYUKI;SHIROTA, MINORI
分类号 B08B3/02;H01L21/304 主分类号 B08B3/02
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