| 发明名称 | Temperature controlled showerhead | ||
| 摘要 | A temperature controlled showerhead for chemical vapor deposition (CVD) chambers enhances heat dissipation to enable accurate temperature control with an electric heater. Heat dissipates by conduction through a showerhead stem and fluid passageway and radiation from a back plate. A temperature control system includes one or more temperature controlled showerheads in a CVD chamber with fluid passageways serially connected to a heat exchanger. | ||
| 申请公布号 | US9476120(B2) | 申请公布日期 | 2016.10.25 |
| 申请号 | US201414169325 | 申请日期 | 2014.01.31 |
| 申请人 | Novellus Systems, Inc. | 发明人 | Meinhold Henner;Doble Dan M.;Lau Stephen;Wilson Vince;Srinivasan Easwar |
| 分类号 | C23C16/455;C23C16/509;H01J37/32 | 主分类号 | C23C16/455 |
| 代理机构 | Weaver Austin Villeneuve & Sampson LLP | 代理人 | Weaver Austin Villeneuve & Sampson LLP |
| 主权项 | 1. A temperature controlled, chandelier-type showerhead for chemical vapor deposition (CVD), the showerhead comprising: (a) a stem comprising a convective cooling fluid passageway and configured for attachment to a chamber; (b) a back plate thermally coupled to the stem; and (c) a face plate thermally coupled to the back plate, wherein the convective cooling fluid passageway is configured such that the temperature of cooling fluid exiting the convective cooling fluid passageway is the same as the temperature of the stem. | ||
| 地址 | Fremont CA US | ||