| 摘要 |
PROBLEM TO BE SOLVED: To write arbitrary test data to each of a plurality of data input/output terminals without making a probe card probe contact all the data input/output terminals.SOLUTION: In a write test operation, write test data, which is serially supplied using a command address signal CA8, is sequentially supplied to data input/output terminals DQ0 to DQ15. In a read test operation, read test data, which is supplied in parallel to the data input/output terminals DQ0 to DQ15, is serially output from a data mask terminal DM0 in synchronization with a shift clock signal CA9 that is supplied from a command address terminal. This allows individual test data to be written to each of the terminals in a state where the number of terminals being used is reduced. Thus, even when a final test for shipment is performed in a wafer state, it becomes unnecessary to make a probe card probe contact all the data input/output terminals. |
