| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a semiconductor device using microcrystal silicon that has high mobility and needs no special post-processing step during manufacturing. Ž<P>SOLUTION: The semiconductor device includes a semiconductor containing nanocluster silicon and nanocrystal silicon, and the nanocluster silicon is larger in volume than the nanocrystal silicon. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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