发明名称 GYROSCOPE SENSOR
摘要 <P>PROBLEM TO BE SOLVED: To provide a gyroscope sensor which is hard to influence by a working environmental condition, which suppresses the variation of a natural frequency at the time of shift to a sensing mode (asymmetry or symmetry) from an actuation mode (symmetry or asymmetry), which is hard to influence of the working environmental condition suitable for highly precise instrumentation, and, moreover, has a sufficient shock resistance or breakdown-proof nature. <P>SOLUTION: The gyroscope sensor of tripod tuning fork which consists of a spring material is composed. In this case, the gyroscope sensor is formed from one plate of a material having piezoelectricity, and a vibrator having a superficial geometry which has a proximal which connects three legs, a supporting member which fixes the gyroscope sensor to the base, a plurality of coupling sections having a width narrower than one-third of the width of the proximal for connecting the above-mentioned proximal and the supporting member, and a plurality of coupling sections having a width narrower than one third of the width of the proximal, is used. <P>COPYRIGHT: (C)2007,JPO&INPIT
申请公布号 JP2007101516(A) 申请公布日期 2007.04.19
申请号 JP20050321474 申请日期 2005.10.07
申请人 MICROSTONE CORP 发明人 OKADA YOSHIYA;NISHIZAWA TAKESHI;HATAKEYAMA MINORU
分类号 G01C19/56;G01P9/04;H01L41/08;H01L41/18 主分类号 G01C19/56
代理机构 代理人
主权项
地址