发明名称 CARRYING JIG
摘要 PROBLEM TO BE SOLVED: To provide a carrying jig capable of easily screening defective chips from among individually divided chips.SOLUTION: Disclosed is a carrying jig which carries a work-piece divided into a plurality of chips from a processing device including: a chuck table holding the work-piece and dividing means for dividing the work-piece held on the chuck table into a plurality of chips. This jig includes: a holding plate including a chip holding part for sucking and holding each of the plurality of chips on the surface; sucking means for exerting negative pressure on the chip holding part of the holding plate; and a grip member arranged on the rear face of the holding plate.SELECTED DRAWING: Figure 7
申请公布号 JP2016201511(A) 申请公布日期 2016.12.01
申请号 JP20150082551 申请日期 2015.04.14
申请人 DISCO ABRASIVE SYST LTD 发明人 KATO TAKUYA;FUKUOKA TAKEOMI;KANEKO MASANOBU;KUNIYASU KAZUHIRO
分类号 H01L21/301;H01L21/677;H01L21/683 主分类号 H01L21/301
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