AN ARRANGEMENT FOR HOLDING A SUBSTRATE IN A MATERIAL DEPOSITION APPARATUS
摘要
An arrangement (1) for holding a substrate (10) in a material deposition apparatus, which substrate (10) has a deposition side (10a) upon which material (M) is to be deposited, and which arrangement (1) comprises: a shadow mask (20) comprising a number of deposition openings (Di); a support structure (30) comprising a number of surround openings (Si); and a support structure holding means (6) for holding the support mask (30) and/or a substrate holding means (5) for holding the substrate (10), such that the support structure (30) is on the same side as the deposition side (10a) of the substrate (10), and the shadow mask (20) is positioned between the substrate (10) and the support structure (30) such that at least one deposition opening (Di) of the shadow mask (10) lies within a corresponding surround opening (Si) of the support structure (30).
申请公布号
EP2425034(B1)
申请公布日期
2016.07.13
申请号
EP20100713005
申请日期
2010.03.29
申请人
OSRAM OLED GMBH
发明人
KRIJNE, JOHANNES;EILING, ERWIN;HOHAUS, KARL-HEINZ;GOERGEN, WOLFGANG;PHILIPPENS, MARC;SCHEICHER, RICHARD;FISCHER, ANSGAR;MUELLER, MARTIN;LOVICH, ANDREAS