摘要 |
PROBLEM TO BE SOLVED: To easily and surely separate a measurement medium from a measurement element (piezoelectric resistor) and an evaluation circuit at low cost. SOLUTION: This device is provided with a separation device 2, which separates the medium 13 from a conversion device 4, and a transmission device 3 for transmitting mechanical force, which is generated by a pressure p to be measured, from the medium 13 to the conversion device 4. Accordingly, ability to detect the measurement medium, which has excessively high pressure, excessively corrosive properties, or excessively high temperature, is advantageous in the use of a silicon pressure sensor. COPYRIGHT: (C)2007,JPO&INPIT
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