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发明名称
ION SOURCE
摘要
申请公布号
KR0148372(B1)
申请公布日期
1998.10.15
申请号
KR19900018833
申请日期
1990.11.20
申请人
TOKYO ELECTRON LTD.
发明人
KOIISHI, KO;KAWAMURA, KOOHEI
分类号
H01J27/08;H01J27/20;H01J37/08;H01L21/265;(IPC1-7):H01J37/08
主分类号
H01J27/08
代理机构
代理人
主权项
地址
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