Method for manufacturing liquid jetting apparatus and liquid jetting apparatus

摘要

A method for manufacturing a liquid jetting apparatus, which is provided with: a flow passage formation member including a pressure chamber, and a piezoelectric actuator having a vibration film provided on the flow passage formation member, a piezoelectric film arranged on the vibration film to correspond to the pressure chamber, first and second electrodes arranged on different surfaces of the piezoelectric film, a first protective film covering the piezoelectric film, a wire connected to the second electrode, and a second protective film covering the wire, includes: forming a first protective film on the vibration film to cover the piezoelectric film and the second electrode; forming the wire and the second protective film to cover the wire with the first protective film covering the piezoelectric film and the second electrode; and removing a part, of the first protective film, that overlaps with the second electrode, after forming the second protective film.

主权项

1. A method for manufacturing a liquid jetting apparatus;
wherein the liquid jetting apparatus includes:
a flow passage formation member in which a pressure chamber is formed to communicate with a nozzle; anda piezoelectric actuator having;
a vibration film provided on the flow passage formation member to cover the pressure chamber;a piezoelectric film arranged on the vibration film to correspond to the pressure chamber;a first electrode arranged on a surface of the piezoelectric film on a side near to the vibration film;a second electrode arranged on another surface of the piezoelectric film on a side far from the vibration film;a first protective film covering the piezoelectric film;a wire connected to the second electrode; anda second protective film covering the wire; wherein the method comprises:
a first protective film formation step of forming the first protective film on the vibration film to cover the piezoelectric film and the second electrode;a wire formation step of forming the wire;a second protective film formation step of forming the second protective film to cover the wire in a state of the first protective film covering the piezoelectric film and the second electrode; anda first removal step of removing a part, of the first protective film, that overlaps with the second electrode, after the second protective film formation step, so that part of the second electrode is exposed.