METHOD OF MANUFACTURING DESIGN DEFECTIVE MASK

摘要

PROBLEM TO BE SOLVED: To provide a method of manufacturing a design defective mask capable of manufacturing a fine design defective part faithfully and stably.SOLUTION: A method of manufacturing a design defective mask having a design defective part formed intentionally used in an appearance inspection device of a mask for NIL includes a step for forming a first mask having a white defective part by performing etching on a salient of a basic pattern by using a correction device, and a step for forming a second mask having a black defective part where the white defective part is transferred by imprint using the first mask. The manufacturing method is characterized in that the black defective part is the design defective part.