| 摘要 |
PROBLEM TO BE SOLVED: To provide a roll for electron beam exposure, suitable for fabricating a roller mold by irradiating an electron beam while rotating the roll for electron beam exposure.SOLUTION: An amorphous plated layer 3 is provided on a surface of a nonmagnetic base material 2, the amorphous plated layer 3 is polished, and then a resist is coated thereon furthermore. The magnetism of the nonmagnetic base material 2 is preferably equal to or less than earth magnetism. The nonmagnetic base material 2 is, for example, austenitic stainless steel. The surface roughness of the amorphous plated layer 3 is preferably less than 10 nm. The amorphous plated layer 3 is, for example, an amorphous Ni-P plated layer. |
