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发明名称
摘要
申请公布号
JP2005523580(A)
申请公布日期
2005.08.04
申请号
JP20030586390
申请日期
2003.04.17
申请人
发明人
分类号
C23C16/44;C23C16/452;C23C16/455;H01L21/205;H01L21/31;H01L21/316;(IPC1-7):H01L21/31
主分类号
C23C16/44
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代理人
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