APPARATUS FOR MAKING PATTERN AND THREE DIMENSIONAL FIGURE ON THE SURFACE OF CERAMIC MATERIAL AND METHOD THEREOF

摘要

PURPOSE: A process for making micro scopic pattern and three dimensional figure by using a laser etching method on the surface of ceramic materials such as aluminum oxide, aluminum nitride, silicon carbide, and silicon nitride and its apparatus are provided which can make it possible to produce super precision apparatus by ceramic materials. CONSTITUTION: The process comprises a)a first step for supplying process of an etching solution onto the surface of ceramic material, b)a second step for decomposing the ceramic compound into metal and gas by irradiating a laser beam on the surface of ceramic supplied to the etching solution selectively, c)a third step for leaving always the etching solution on a processed part of ceramic material by separating etched metal from the ceramic material, and c)a fourth step for transferring the ceramic material to the direction of X, Y, Z axes. The apparatus comprises a nozzle part for supplying the etching solution onto the surface of ceramic, a laser beam irradiating part for irradiating the laser beam onto the surface of ceramic supplied to the etching solution, a transport part for transferring the ceramic material to the direction of X, Y, Z axes. and a control part for controlling the operation of the nozzle part, the laser beam irradiation part, and the transport part.