| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a diamond electron source which is used for an electron beam, electron beam equipment, and a vacuum tube especially used for an electron microscope and an electron beam exposure equipment in which diamond is used, and which has high brightness and narrow energy width. <P>SOLUTION: This electron source is the diamond electron source and uses a columnar single crystal diamond, and constituted of an electron emitting part 11 and an energization heating part 12. The electron emitting part includes a sharp-pointed protrusion of height of 10μm or more and a tip curvature radius of 5μm or less only at one place at the end face of a column. Impurities most contained in the single crystal diamond of the electron discharge part are nitrogen of which the concentration is 1×10<SP>17</SP>cm<SP>-3</SP>or more, and in which resistance between room temperature (25°C) terminals of the energization heating part is 500Ωor less. <P>COPYRIGHT: (C)2010,JPO&INPIT</p> |
