| 摘要 |
PROBLEM TO BE SOLVED: To provide a piezoelectric material film laminate board by use of a lead-free niobate alkali piezoelectric material, which enables the arrangement of piezoelectric material film elements high in piezoelectric material characteristics and small in variation in characteristic therebetween.SOLUTION: A piezoelectric material film laminate board according to the present invention is arranged by laminating a lower electrode film and a piezoelectric material film on a base in turn. The layer composed of the piezoelectric material film includes sodium potassium lithium niobate (of which the compositional formula is given by (NaKLi)NbO, where 0≤x≤1, 0≤y≤1, 0≤z≤0.2, and x+y+z=1). The lower electrode film has an average thickness of 100-350 nm; in the in-plane distribution of the thicknesses thereof, the relative standard deviation is 14% or less. |
