发明名称 Laser Processing Apparatus
摘要 Disclosed is a laser processing apparatus for minimizing generation of sludge and enhancing the processing efficiency while processing an object. The laser processing apparatus includes a beam irradiator for emitting a laser beam from a laser light source, a beam scanner for operating the laser beam emitted from the beam scanner, to be irradiated on a predetermined interval of a processing position of the object repeatedly on the straight, and a condensing lens for regulating a focus of the laser beam emitted from the beam irradiator The object is movable at least once along a processing direction during processing the object. According to the present invention, it is able to improve the processing efficiency and to work an object with a uniform morphology by using a mask filtering a laser beam irradiated at a rotation turning point of a beam scanning mirror, capable of continuously irradiating a laser beam by deforming the laser beam into an elliptical pattern.
申请公布号 US2008088900(A1) 申请公布日期 2008.04.17
申请号 US20070578373 申请日期 2007.07.29
申请人 EO TECHNICS CO., LTD. 发明人 HIE HAN;HONG EUN JEONG;LEE HAK YONG;JUNG WON CHUL
分类号 H01L21/78;B23K26/06;B23K26/073;B23K26/08 主分类号 H01L21/78
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