VALVE DEVICE

摘要

A recess 22 provided in a passage block 20; a diaphragm covering the recess 22 to form a valve chest 21 in which a fluid flows; an inflow port 23 opened at the recess 22 and allowing the fluid to flow into the valve chest 21; an NC outflow port 24 and an NO outflow port 25 opened at the recess 22 and allowing the fluid to flow out from the valve chest 21; by oscillating the diaphragm, the diaphragm is closely fitted to any one of a first valve seat 24b formed by an opening 24a of the NC outflow port 24 and a second valve seat 25b formed by an opening 25a of the second outflow port 25, to allow the fluid in the valve chest 21 to flow out from the other outflow port. The recess 22 has a first inclined portion 81 and a second inclined portion 82 having a depth gradually increasing from the first valve seat 24b and the second valve seat 25b toward the inflow opening 23.

主权项

1. A valve device having
a recess provided in a casing; a diaphragm covering the recess so as to form a valve chest as a space between the recess and the diaphragm in which a fluid flows; an inflow port opened at the recess and allowing the fluid to flow into the valve chest; an outflow port opened at the recess and allowing the fluid to flow out from the valve chest; and a diaphragm driving means for oscillating the diaphragmto allow the diaphragm to closely fit to orseparate from a valve seatformed by an opening of the outflow portso as to shut or open the outflow port,characterized in that
the recess has an inclined portion whose depth gradually increases from the valve seat side toward an inflow opening where the inflow port communicates with the valve chest, the valve chest has a vertical direction in which the outflow port and the inflow port are arranged, and a width direction orthogonal to the vertical direction and the direction of the depth, and by a first protrusion provided on each side of the inflow opening in the width direction, the inclined portion has a taper shape in which the width is gradually increased from the inflow opening toward the valve seat.