| 摘要 |
PROBLEM TO BE SOLVED: To excellently and reliably peeling an outer layer body from a substrate with a simple process and a simple constitution, and to obtain a peeled surface of high quality. SOLUTION: In a supporting body peeling device 122, chucks 142a, 142b hold a base film 26. Firstly, the chucks 142a, 142b are moving along a speed pattern of the S-shaped curve to start peeling of the base film 26 from an affixed substrate 24a. Secondly, before the entire base film 26 is peeled from the affixed substrate 24a, the chucks 142a, 142b are moved along the curved speed pattern to complete the peeling work of the base film 26. COPYRIGHT: (C)2008,JPO&INPIT
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