EXPOSED CONDUCTOR SYSTEM AND METHOD FOR SENSING AN ELECTRON BEAM
摘要
A detector is disclosed for sensing an intensity of an electron beam generated along a path. An exemplary detector includes an exposed conductor attached to a support which is configured to locate the exposed conductor within a path of an electron beam; a grounded conductor isolated from the exposed conductor, the grounded conductor partly surrounding the exposed conductor to form a plasma shield having a window positioned at least in a direction of the electron beam path.
申请公布号
EP1943542(A1)
申请公布日期
2008.07.16
申请号
EP20060799746
申请日期
2006.10.10
申请人
TETRA LAVAL HOLDINGS & FINANCE SA
发明人
NAESLUND, LARS AAKE;HALLSTADIUS, HANS;KRISTIANSSON, ANDERS;HEDSE OLSSON, ANDERS