发明名称 Crucible eliminating line of sight between a source material and a target
摘要 A crucible for heating material to be deposited on a target substrate includes a body configured to contain source material, a base formed at a first end of the body, and an emitting orifice formed at a second end of the body. The crucible further includes at least one intermediate orifice arranged and configured such that the heated source material passes through the intermediate orifice and impacts at least once upon the inner surface of the crucible body before passing through the emitting orifice.
申请公布号 US2007218199(A1) 申请公布日期 2007.09.20
申请号 US20060353708 申请日期 2006.02.13
申请人 VEECO INSTRUMENTS INC. 发明人 BRESNAHAN RICHARD C.;GOTTHOLD DAVID W.;PRIDDY SCOTT W.
分类号 C23C16/00 主分类号 C23C16/00
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