| 摘要 |
PROBLEM TO BE SOLVED: To provide a diamond fine powder which has excellent polishing performance and hardly forms rigid agglomerates and which has a D50 value of <50 nm. SOLUTION: 1. The diamond fine powder is an assembly of single crystal diamond particles in which the D50 value is <50 nm. A portion of the surface of each particle is converted into carbon having a non-diamond structure, and the carbon having the non-diamond structure, which is formed in heating operation, is disposed between the particles. 2. A method for producing the diamond fine particles comprises pulverizing a single crystal raw material diamond with a mechanical impact-crushing means, then obtaining the diamond fine powder having a D50 value of <50 nm in a precise classification process, sticking a carbon generating agent on the particle surface by dipping the particles into a solution or a dispersion of the carbon generating agent, and heating the particles at 800-1,400°C in an inert atmosphere. At this time, the carbon having the non-diamond structure, previously formed or formed from the carbon generating agent in situ, is used as a separation agent between the diamond particles, and thereby, the agglomeration of the particles is effectively avoided. COPYRIGHT: (C)2006,JPO&NCIPI
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