| 摘要 |
PROBLEM TO BE SOLVED: To provide an inspection apparatus configured to generate a reference image appropriately, an inspection method, and a program.SOLUTION: An inspection apparatus includes: an illumination light source 11 which generates illumination light for illuminating a sample 21 with a pattern 22; a detector 15 which images the sample illuminated by the illumination light from the illumination light source 11; and a processing apparatus 16 which inspects the sample 21, on the basis of the image captured by the detector 15. The processing apparatus 16 includes: an approximating unit 62 which determines a sigmoid function by approximating a profile of an edge section of the pattern 22, on the basis of the captured image; a PSF calculation unit 63 which calculates a point image distribution function, on the basis of the sigmoid function; a reference image generation unit 64 which generates a reference image by convolving the point image distribution function on the database image based on design data of the sample; and a comparison unit 65 which compares the reference image with the captured image.SELECTED DRAWING: Figure 2 |
