| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for manufacturing a solar cell to obtain a solar cell having high productivity and good output characteristics and reliability.SOLUTION: The method for manufacturing a solar cell includes steps of: forming a rugged structure in a part of at least non-light-receiving surface of a crystalline silicon substrate; forming a first high concentration layer having a higher concentration of an added impurity than in the substrate and having a different type of conductivity from that of the substrate, on at least a part of a light-receiving surface; locally forming a second high concentration layer having a higher concentration of an added impurity than in the substrate and having the same conductivity type as the substrate, on the non-light-receiving surface; thermally oxidizing the substrate to form an oxide film; etching the oxide film to expose the silicon surface in at least a part of a region except for the region where the second high concentration layer is formed on the non-light-receiving surface; forming a collector electrode that extracts charges excited by incident light to the substrate to the outside, on the first high concentration layer and on the second high concentration layer; and smoothing at least a part of the rugged structure in a region except for the region where the first high concentration layer and the second high concentration layer are formed on the non-light-receiving surface. |
