ROOM TEMPERATURE CONDUCTING DENSE THICK FILM PREPARED BY AEROSOL DEPOSITION AND PREPARATION METHOD THEREOF

摘要

A conductive oxide thick film and a manufacturing method thereof are provided to obtain an electric conductive characteristic by preventing the phase change due to a room temperature process. The conductive oxide material powder is mixed by a milling process. The conductive oxide material powder is made of La2O3 or La(CH3COO)3.6H2O, NiO, Ni (CH3COO) 4.4H2O or Ni(NO3)4.6H2O. The conductive oxide is made by performing a calcining process. The conductive oxide powder is made by re-milling the made conductive oxide. The made conductive oxide powder is deposited in the upper part of the substrate by an aerosol deposition method. The substrate is thermally processed in the temperature of 300 to 700 degrees centigrade.