发明名称 |
Method of manufacturing organic light emitting device by using mirror shaped target sputtering apparatus |
摘要 |
A method of manufacturing an organic light emitting device by using a facing target sputtering apparatus is provided. The method includes forming a first electrode on a substrate; forming an organic film on the first electrode; and forming a second electrode on the organic film by using a facing target sputtering apparatus. Accordingly, an electrode film is formed on the organic light emitting device at a low temperature without deterioration of the electrode film due to plasma, it is possible to improve light emitting efficiency and electro-optical characteristics of the organic light emitting device. |
申请公布号 |
EP1670080(A1) |
申请公布日期 |
2006.06.14 |
申请号 |
EP20050106009 |
申请日期 |
2005.07.01 |
申请人 |
SAMSUNG SDI CO., LTD. |
发明人 |
LEE, KYU-SUNG;KIM, HAN-KI;KIM, DO-GEUN;HUH, MYUNG-SOO;JEONG, SEOK-HEON |
分类号 |
H01L51/56;C23C14/35;H01L51/50 |
主分类号 |
H01L51/56 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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