| 摘要 |
PROBLEM TO BE SOLVED: To simplify a process for measuring the shape of a target by a pattern mirrored in the target.SOLUTION: A first image-capturing device 10 and a second image-capturing device 12 capture an image of each pattern mirrored in a target 20 from a display 16. A control/arithmetic unit 18 finds, on the basis of an image of each mirrored pattern, a physical relationship vector m1 indicating physical relationship between a center point C1 of image capture and a display point A1 on a display surface, and finds a physical relationship vector m2 indicating physical relationship between a center point C2 of image capture and a display point A2 on a display surface. The control/arithmetic unit 18 finds the position of each measurement point on the target 20 using the physical relationship vectors m1 and m2 on the basis of a geometric optical relation that holds true with regard to an optical path from the display point through measurement points on the target 20 to the first center point C1 of image capture and a geometric optical relation that holds true with regard to an optical path from the display point through measurement points on the target 20 to the second center point C2 of image capture.SELECTED DRAWING: Figure 1 |
