| 摘要 |
PROBLEM TO BE SOLVED: To provide an observation device that allows an object surface of, for example, about 24.6x24.6 mm to be observed with resolving power equal to or less than 10 micron, and at a large tilt angle exceeding 45 degrees.SOLUTION: An observation device 10 comprises: a light reception surface 20; and an image formation optical system 30 that causes light from an object surface S to be formed on the light reception surface 20. The image formation optical system 30 includes: a concave surface primary mirror 32; a secondary mirror 34; and a drawing plane mirror 36. After a light flux of the light from the object surface S is reflected in order of the concave surface primary mirror 32, the convex surface secondary mirror 34, and a concave surface primary mirror 32, the light flux is formed on the light reception surface 20 via the drawing plane mirror 36. The observation device 10 comprises: first tilting means that allows an angle α formed with an optical axis L1 of the light heading for the concave surface primary mirror 32 from the object surface S and a perpendicular line N1 of the object surface S to be changed; and second tilting means that allows an angle β formed with an optical axis L2 heading for the light reception surface 20 from the drawing plane mirror 36 and a perpendicular line N2 of the light reception surface 20 to be changed.SELECTED DRAWING: Figure 7 |
