PROBE STATION THERMAL CHUCK WITH SHIELDING FOR CAPACITIVE CURRENT,申请号KR20000036331-传众专利搜索

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发明名称	PROBE STATION THERMAL CHUCK WITH SHIELDING FOR CAPACITIVE CURRENT
摘要
申请公布号	KR100676713(B1)	申请公布日期	2007.01.31
申请号	KR20000036331	申请日期	2000.06.29
申请人		发明人
分类号	G01R31/26;H01L21/66;G01R1/06;G01R1/18;G01R31/28;H01L35/00;H01L35/32	主分类号	G01R31/26
代理机构		代理人
主权项
地址

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