| 摘要 |
PROBLEM TO BE SOLVED: To provide a charged particle beam apparatus in micromanipulation and a probe control technique using an image analyzer. SOLUTION: A probe controller 4 applies a voltage to a probe, to enhance the contrast between a probe and the surface of a sample 3 so that effect of a sample surface image is removed from a secondary particle image of a charged particle ray device. Then, the position of the probe is detected by image analysis of an image under observation, to guide a probe 11 to a desired position.
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