EXCIMER LAMP HAVING UV REFLECTING LAYER OF MULTILAYER STRUCTURE AND MANUFACTURING METHOD THEREOF

摘要

The present invention relates to an excimer lamp which includes an ultraviolet (UV) ray reflection film having a multi-layer structure and a manufacturing method thereof. The excimer lamp has excellent reliability, high heat endurance, and a high reflection rate. The excimer lamp is also capable of preventing the reflection film from being released by enhancing the adhesion of a coating material. According to the present invention, the excimer lamp includes; an excimer lamp discharging container made of silica glass; a pair of electrodes formed on the excimer lamp discharging container; and the ultraviolet reflection layer having the multi-layer structure formed on the inner surface of the excimer lamp discharging container for reflection and binding. The method includes: a discharging container forming step of forming the discharging container made of silica glass; a UV ray reflection layer forming step of forming the UV ray reflection layer which is arranged on the inner surface of the discharging container and includes a binding layer and a reflection layer; and an electrode forming step of forming the electrode pair in the discharging container.