发明名称 フォトレジスト用樹脂組成物の製造方法
摘要 Provided is a photoresist resin composition having excellent sensitivity and resolution and high film retention, as well as other properties that are at least commensurate with those of the commonly used compositions. The photoresist resin composition contains a high-ortho-novolac phenol resin, a naphthoquinone diazide derivative, and a solvent, the high-ortho-novolac phenol resin being obtained by reacting an aldehyde and one or two compounds selected from meta-cresol, para-cresol, 3,5-xylenol, and 2,3,5-trimethylphenol in the presence of an acid catalyst at a temperature of 110-220°C.
申请公布号 JP6003881(B2) 申请公布日期 2016.10.05
申请号 JP20130501019 申请日期 2012.02.20
申请人 住友ベークライト株式会社 发明人 今村 裕治
分类号 G03F7/023;C08G8/02 主分类号 G03F7/023
代理机构 代理人
主权项
地址