发明名称 DUAL SIDED EMBEDDED DIE AND FABRICATION OF SAME BACKGROUND
摘要 Embodiments of the invention provide a method for forming a dual sided embedded die system. The method begins with starting material including a top surface and a bottom surface, a plurality of vias, a plurality of plated metal posts, die pads, and stiffeners. The surface are planarized to expose the included metal which is than selectively etching from die attach pad DAP areas to form cavities. Create a stiffener by using photo resist patterning and plating. Apply tacky tape. Attach a die. Laminate and grind. Remove tacky tape. Form redistribution layers RDLs and a solder mask. Mounting Surface Mount Devices.
申请公布号 US2016240392(A1) 申请公布日期 2016.08.18
申请号 US201615137114 申请日期 2016.04.25
申请人 Texas Instruments Incorporated 发明人 Poddar Anindya;Gerber Mark Allen;Masumoto Mutsumi;Matsuura Masamitsu;Aoya Kengo;Onogami Takeshi
分类号 H01L21/56;H01L21/48 主分类号 H01L21/56
代理机构 代理人
主权项
地址 Dallas TX US